Thin film bulk acoustic resonator filters with a piezoelectric layer of lead scandium tantalum oxide

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Aug 10, 2004
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Aug 29, 2002
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Apr 2, 2002
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May 24, 2000

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Abstract

An electric filter comprises a plurality of thin film bulk acoustic resonators arranged in series and in parallel which have different thicknesses of one or more non-piezoelectric layers, for example top electrode.

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SNAPTRACK INC	5775 MOREHOUSE DR SAN DIEGO CA 92121

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H03H:IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONA....

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Inventor Name	Address	# of filed Patents	Total Citations
Kirby, Paul B	Northampton, GB	4	148
Komuro, Eiju	Funabashi, JP	21	463
Su, Qingxin	Xi'an, CN	4	148
Whatmore, Roger W	Milton Keynes, GB	19	373

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Thin film bulk acoustic resonator filters with a piezoelectric layer of lead scandium tantalum oxide

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United States of America Patent

10031240

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PATENT NO	6774746
APP PUB NO	20020118079A1
SERIAL NO	10031240
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
August 10, 2004	US,6774746,B2 US6774746B2	GRANTED PATENT AS SECOND PUBLICATION
August 29, 2002	US,20020118079,A1 US20020118079A1	FIRST PUBLISHED PATENT APPLICATION

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