Microelectrical mechanical structure (MEMS) optical modulator and optical display system
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United States of America Patent
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Aug 10, 2004
Grant Date -
N/A
app pub date -
Oct 31, 2000
filing date -
Oct 31, 2000
priority date (Note) -
Expired
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Abstract
A MEMS optical display system includes an illumination source for providing illumination light, a collimating lens for receiving the illumination light and forming from it collimated illumination light, and a converging microlens array having an array of lenslets that converge the collimated illumination light. The converging microlens array directs the illumination light to a microelectrical mechanical system (MEMS) optical modulator. The MEMS optical modulator includes, for example, a planar substrate through which multiple pixel apertures extend and multiple MEMS actuators that support and selectively position MEMS shutters over the apertures. A MEMS actuator and MEMS shutter, together with a corresponding aperture, correspond to pixel. The light from the converging microlens array is focused through the apertures and is selectively modulated according to the positioning of the MEMS shutters by the MEMS actuators, thereby to impart image information on the illumination light. The light is then passed to a diffused transmissive display screen by a projection microlens array.
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Patent Owner(s)
| Patent Owner | Address | |
|---|---|---|
| MICROSOFT TECHNOLOGY LICENSING LLC | ONE MICROSOFT WAY REDMOND WA 98052 |
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Inventor(s)
| Inventor Name | Address | # of filed Patents | Total Citations |
|---|---|---|---|
| Sinclair, Michael J | Kirkland, WA | 110 | 7649 |
| Starkweather, Gary K | Bellevue, WA | 37 | 1067 |
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| Fee | Large entity fee | small entity fee | micro entity fee |
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| Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
| Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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