Yttrium oxide based surface coating for semiconductor IC processing vacuum chambers

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United States of America Patent

PATENT NO 6776873
SERIAL NO

10075967

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Abstract

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To further enhance the chamber material performance of anodized aluminum alloy materials against fluorine and oxygen plasma attack, a ceramic-based surface coating, high purity yttrium oxide coating, is provided on the anodized aluminum alloy parts.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kumar, Ananda H 1999 Blackfoot Dr., Fremont, CA 94539 120 3509
Lin, Yixing 18026 King Ct., Saratoga, CA 95070 20 1565
Stow, Clifford C 480 N. Winchester Blvd. #5, Santa Clara, CA 95050 13 766
Sun, Jennifer Y 9964 Alpine Ter., Sunnyvale, CA 94086 261 13472
Thach, Senh 32257 Jean Dr., Union City, CA 94587 47 4955
Wang, Hong 10355 Cherrytree La., Cupertino, CA 95014 1168 13527
Wu, Robert W 3112 Paseo Granada, Pleasanton, CA 94566 22 1071
Wu, Shun Jackson 7747 Lilac Way, Cupertino, CA 95014 8 521

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