Gas distribution system
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United States of America Patent
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-
Aug 24, 2004
Grant Date -
Jun 24, 2004
app pub date -
Jul 16, 2003
filing date -
Jul 16, 2002
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A gas distribution system according to an embodiment includes flowing a first gas stream from a first dispensing cylinder to a receiving cylinder. When the pressure differential between the first dispensing cylinder and the receiving cylinder obtains a selected value, stopping the flow of the first gas stream, and flowing a second gas stream from a second dispensing cylinder to the receiving cylinder. When the pressure differential between the second dispensing cylinder and the receiving cylinder obtains a selected value, stopping the flow of the second gas stream, increasing the pressure of a third gas stream from the first dispensing cylinder to a pressure greater than the second dispensing cylinder pressure, and flowing the third gas stream into the second dispensing cylinder until the pressure in the second cylinder has increased to a selected value. In other embodiments, an intensifier is used to increase the pressure of a gas stream.
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