Forming tool for forming a contoured microelectronic spring mold
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United States of America Patent
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Aug 24, 2004
Issued Date -
N/A
app pub date -
Feb 27, 2001
filing date -
Jul 30, 1999
priority date (Note) -
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status (Latency Note)
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Abstract
A forming tool with one or more embossing tooth, and preferably, a plurality of such embossing teeth, arranged on a substantially planar substrate, is disclosed. Each embossing tooth is configured for forming a sacrificial layer to provide a contoured surface for forming a microelectronic spring structure. Each embossing tooth has a protruding area corresponding to a base of a microelectronic spring, and a sloped portion corresponding to a beam contour of a microelectronic spring. Numerous methods for making a forming tool are also disclosed. The methods include a material removal method, a molding method, a repetitive-stamping method, tang-bending methods, and segment-assembly methods.
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