Microstructures including hydrophilic particles
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United States of America Patent
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Aug 24, 2004
Issued Date -
N/A
app pub date -
Jul 21, 2000
filing date -
Dec 12, 1996
priority date (Note) -
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Abstract
A substrate is placed on a charging surface, to which a first voltage is applied. Etch-resistant dry particles are placed in a cup in a nozzle to which a second voltage, less than the first voltage, is applied. A carrier gas is directed through the nozzle, which projects the dry particles out of the nozzle toward the substrate. The particles pick up a charge from the potential applied to the nozzle and are electrostatically attracted to the substrate. The particles adhere to the substrate, where they form an etch mask. The substrate is etched and the particles are removed. Emitter tips for a field emission display may be formed in the substrate.
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