Micromachining with high-energy, intra-cavity Q-switched CO2 laser pulses
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United States of America Patent
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Aug 31, 2004
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app pub date -
May 9, 2002
filing date -
May 9, 2001
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Abstract
An EOM Q-switched CO.sub.2 laser produces bursts of laser pulses delivered at a high PRF such as 20-140 kHz and having a short high-power spike of about 80-150 ns followed by a lower-power tail of about 0.05-12.0 .mu.s. The bursts and/or laser pulses can be shaped by controlling the RF pumping duty cycle, the delay between the onset of RF pumping and the initiation of Q-switching, the pulse repetition frequency, and/or the duration of the tail. The bursts of laser pulses can be adapted to facilitate machining of metal layers and/or layers containing materials having disparate vaporization temperatures and/or disparate melting points, such as FR4 or green ceramics.
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