Process and apparatus for real-time determination of a solid sample composition as a function of the depth within the sample
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United States of America Patent
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Aug 31, 2004
Grant Date -
Dec 5, 2002
app pub date -
Feb 4, 2002
filing date -
Feb 1, 2001
priority date (Note) -
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Abstract
Process and apparatus for real-time determination of a solid sample composition as a function of the depth within the sample. The process comprises: forming a glow discharge (16) of atoms sputtered from an exposed area (17) of the sample (13) and analysing the glow discharge by optical emission spectroscopy; measuring the distance between said exposed area (17) and a fixed reference surface (12a) and determining from the measured distance the depth of the exposed area within the sample; and correlating the determined depth of the exposed area with the glow discharge analysis. Application to material analysis.
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