Optical attenuating device and method of manufacture therefor
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United States of America Patent
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Aug 31, 2004
Grant Date -
Sep 4, 2003
app pub date -
Mar 1, 2002
filing date -
Mar 1, 2002
priority date (Note) -
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Abstract
The present invention provides, in one aspect, an optical device, a method of manufacture therefor, and an optical system including the same. The optical device may include a membrane configured to be electrically deformable and reflective. The membrane may further be positioned over a cavity located within a substrate. The device may additionally include a transmissive spacer coupled to the substrate, and a lens coupled to the transmissive spacer and optically aligned with the membrane.
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