Device having one or more contact structures interposed between a pair of electrodes
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United States of America Patent
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Sep 7, 2004
Grant Date -
N/A
app pub date -
Oct 16, 2001
filing date -
Oct 16, 2001
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A microelectromechanical device is provided which includes a contact structure interposed between a pair of electrodes arranged beneath a beam. In some embodiments, the device may include additional contact structures interposed between the pair of electrodes. For example, the device may include at least three contact structures between the pair of electrodes. In some embodiments, the beam may be suspended above the pair of electrodes by a support structure affixed to a first end of the beam. Such a device may further include an additional support structure affixed to a second end of the beam. In some cases, the device may be adapted to pass a signal from the first end to the second end of the beam. In addition or alternatively, the device may be adapted to pass the signal between one or both ends of the beam and one or more of the contact structures.
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