Damped micromechanical device
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United States of America Patent
Stats
-
Sep 7, 2004
Grant Date -
Aug 1, 2002
app pub date -
Jun 6, 2001
filing date -
Jun 6, 2000
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A damped micromechanical device comprising a substrate, a movable structure overlying the substrate and a flexural member having a first end portion coupled to the substrate and a second end portion coupled to the movable structure. The movable structure is movable at a resonant frequency between first and second positions relative to the substrate. A damping material is adhered to at least a portion of the flexural member for damping the movement of the movable structure at the resonant frequency. A method for making the micromechanical device is provided.
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