Multiplexed analog control system for electrostatic actuator array
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United States of America Patent
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Sep 7, 2004
Grant Date -
Aug 8, 2002
app pub date -
Sep 7, 2001
filing date -
Feb 7, 2001
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A multiplexed analog control system for an micro electromechanical systems (MEMS) array of electrostatic actuators, such as tiltable mirrors in an optical switch. Each actuator includes a variable gap capacitor formed as part of the movable mechanical element. A hold capacitor is connected to each actuator capacitor, and a selectable high-voltage inverter connects them to provide a bipolar drive signal of 50% duty cycle. A single power digital controlled current source is connected to all the drive circuits to provide a high-power correction signal. Address decoders enable a selected one of the drive circuits to add or subtract the correction from the hold capacitor.
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