Alkali development type photocurable composition and calcined pattern obtained by use of the same
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United States of America Patent
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Sep 21, 2004
Grant Date -
Jul 25, 2002
app pub date -
Jan 11, 2002
filing date -
Jul 12, 1999
priority date (Note) -
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Abstract
An alkali development type photocurable composition comprises (A) an alkali-soluble macromolecular binder having a weight-average molecular weight in the range of 5,000 to 100,000 and an acid value in the range of 50 to 150 mg KOH/g and obtained by causing (d) a compound possessing one glycidyl group in its molecule to react with a carboxyl group of (A-1) a copolymer of (a) an ethylenically unsaturated bond-containing compound possessing one carboxyl group in its molecule with (b) an ethylenically unsaturated bond-containing compound possessing neither hydroxyl group nor acidic group in its molecule, or a carboxyl group of (A-2) a copolymer of the compounds (a) and (b) mentioned above and (c) an ethylenically unsaturated bond-containing compound possessing a hydroxyl group and then causing (e) a polybasic acid anhydride to react with a hydroxyl group caused by the above reaction, (B) an inorganic powder, (C) a photopolymerizable monomer, (D) a photopolymerization initiator, and (E) an organic solvent. By using this composition, such calcined patterns as a conductor pattern and a dielectric pattern of high fineness may be formed by the photolithographic technique.
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