Multi-layer Pt electrode for DRAM and FRAM with high K dielectric materials
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United States of America Patent
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Sep 21, 2004
Grant Date -
Jul 4, 2002
app pub date -
Dec 28, 2000
filing date -
Dec 28, 2000
priority date (Note) -
Expired
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Abstract
A multi-layer electrode (246) and method of fabrication thereof in which a conductive region (244) is separated from a barrier layer (222) by a first conductive liner (240) and a second conductive liner (242). First conductive layer (240) comprises Pt, and second conductive liner (242) comprises a thin layer of conductive oxide. The multi-layer electrode (246) prevents oxygen diffusion through the top conductive region (244) and reduces material variation during electrode patterning.
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