Probe device
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Sep 21, 2004
Grant Date -
Jun 17, 2004
app pub date -
Sep 29, 2003
filing date -
Dec 13, 2001
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
In the bottom face of a head plate (14), a recessed portion (14A) open to the front of a prober chamber (11) is formed. In the recessed portion (14A), a card exchange mechanism (20) for exchanging a probe card (13) is arranged. The exchange mechanism (20) includes a card supporting member (21) for supporting thereon the probe card (13), retractable mechanisms (22), air cylinders (24) and cam mechanisms (35). The retractable mechanisms (22) are designed to move the supporting member (21) in substantially horizontal directions between a connecting position of the probe card (13) corresponding to a pogo ring (16), and a region near a side opening of a case (10C). The air cylinders (24) and the cam mechanisms (35) are designed to move the supporting member (21) in vertical directions with respect to the head plate (14) so as to connect/disconnect the probe card (13) to/from a test head (15) via the pogo ring (16).
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