Inspection method and apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Sep 21, 2004
Grant Date -
Aug 9, 2001
app pub date -
Jan 26, 2001
filing date -
Jan 27, 2000
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A statistical processing unit compares the gray levels at identical positions in raw and reference images using a raw image having three or more gray levels obtained by sensing an object by an image pick-up unit. As the reference image, a predetermined designed image or at least one shift image obtained by shifting the raw image by an integer multiple of the repetition period in the repetition direction of a specific pattern is used. The statistical processing unit statistically analyzes the occurrence state of the difference between the raw and reference images, thus accurately obtaining the formation state of repetitive patterns on the object.
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