Multiple local probe measuring device and method
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United States of America Patent
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Sep 28, 2004
Grant Date -
Jan 30, 2003
app pub date -
Sep 24, 2002
filing date -
Sep 20, 1999
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
The invention provides a probe measuring device for effecting local measurements referring to a sample, having a first probe and a second probe, a measurement condition adjustment arrangement adapted to commonly adjust a first measurement condition of the first probe with respect to a sample or a reference surface and a second measurement condition of the second probe with respect to a sample or a reference surface, a detection arrangement having a first detection arrangement associated with the first probe adapted to independently detect first measurement data referring to local measurements effected by the first probe and a second detection arrangement associated with the second probe adapted to independently detect second measurement data referring to local measurements effected by the second probe. Also provided are methods for effecting local measurements and local manipulations using multiple probes.
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