Micro electromechanical switches
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United States of America Patent
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Sep 28, 2004
Grant Date -
Jan 9, 2003
app pub date -
Apr 1, 2002
filing date -
Apr 2, 2001
priority date (Note) -
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status (Latency Note)
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Abstract
A micro electromechanical switch structure includes a beam that is continuously controllable by adding an actuation electrode proximate to, but outside a beam projection. The beam projection is onto and perpendicular to a plane of the actuation electrode. By placing an actuation electrode beside a beam instead of underneath the beam, the actuation electrode can continuously control the movement of the beam from a rest position to a complete actuation.
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