Batch/lot organization based on quality characteristics
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United States of America Patent
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Sep 28, 2004
Grant Date -
N/A
app pub date -
Jun 27, 2002
filing date -
Jun 27, 2002
priority date (Note) -
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Abstract
A method and an apparatus for performing a batch organization of semiconductor wafers. Data relating to metrology data associated with a processed semiconductor wafer in a lot is acquired. A quality characteristic associated with the processed semiconductor wafer is determined based upon the metrology data. A plurality of semiconductor wafers associated with the lot re-organized for subsequent processing, based upon the quality characteristic.
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