Apparatus and methods for heat loss pressure measurement

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United States of America Patent

PATENT NO 6799468
APP PUB NO 20040020301A1
SERIAL NO

10630458

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A heat loss gauge for measuring gas pressure in an environment includes a resistive sensing element and a resistive compensating element. The resistive compensating element is in circuit with the sensing element and has temperature response and physical characteristics substantially matching those of the resistive sensing element and is exposed to a substantially matching environment. An electrical source is connected to the sensing element for applying current to heat the sensing element relative to the compensating element. Measuring circuitry is connected to the sensing element and the compensating element for determining gas pressure in the environment to which the sensing element and compensating element are exposed based on electrical response of the sensing element and the compensating element.

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Patent Owner(s)

Patent OwnerAddress
MKS INSTRUMENTS INC2 TECH DRIVE SUITE 201 ANDOVER MA 01810

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Borenstein, Michael D Boulder, CO 15 186

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