Web-style pad conditioning system and methods for implementing the same

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United States of America Patent

PATENT NO 6800020
SERIAL NO

09678423

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A system for conditioning a pad is provided. The system includes a pad conditioning media, a feed-roll containing a supply of the pad conditioning media, and a take-up roll for receiving an end of the pad conditioning media. Further included in the system is a pressure application member defined between the feed-roll and the take-up roll. The pressure application member is designed to apply pressure onto the pad conditioning media as the pad conditioning media is applied against the pad to cause a conditioning of a surface of the pad.

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Patent Owner(s)

  • APPLIED MATERIALS, INC.

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Boyd, John M Atascadero, CA 104 1657
Mikhaylich, Katrina A San Jose, CA 16 102

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