
US Patent No: 6,800,238
Number of patents in Portfolio can not be more than 2000
Method for domain patterning in low coercive field ferroelectrics
Stats
-
Oct 5, 2004
Issued date -
Jan 15, 2002
filing date -
10/047,550
serial no -
In Force
status
Importance
Abstract
A method for domain patterning of nonlinear ferroelectric materials. The method seeks to reduce the formation of random and spontaneous micro-domains that typically result during thermal cycling of ferroelectric materials and which leads to patterning defects and degraded performance. In accordance with the invention, a ferroelectric wafer is provided with a conductive layer on the top and bottom surfaces of the wafer. A sufficient bias voltage is applied across the conductive layers to polarize the wafer into a single direction. At least one of the conductive layers is selectively patterned to form a conductive domain template. A sufficient revise bias voltage is then applied to the conductive domain template and a remaining conductive layer to produce the domain patterned structure. According to a preferred embodiment of the invention, the ferroelectric wafer is formed of LiNbO.sub.3 or LiTaO.sub.3.
First Claim
Related Publications
International Classification(s)
- [Classification Symbol]
- [Patents Count]
Cited Art
| Patent Info | (Count) | # Cites | Year |
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| 5,280,277 Field updated deformable mirror device | 310 | 1992 | |
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| 5,398,071 Film-to-video format detection for digital television | 140 | 1993 | |
| 5,497,197 System and method for packaging data into video processor | 223 | 1993 | |
| 5,382,961 Bistable DMD addressing method | 111 | 1993 | |
| 5,387,924 Method of mitigating the effects of a defective electromechanical pixel | 54 | 1993 | |
| 5,517,347 Direct view deformable mirror device | 283 | 1993 | |
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| 5,459,528 Video signal processor and method for secondary images | 62 | 1994 | |
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| 5,497,172 Pulse width modulation for spatial light modulator with split reset addressing | 291 | 1994 | |
| 5,454,906 Method of providing sacrificial spacer for micro-mechanical devices | 272 | 1994 | |
| 5,482,564 Method of unsticking components of micro-mechanical devices | 117 | 1994 | |
| 5,499,062 Multiplexed memory timing with block reset and secondary memory | 250 | 1994 | |
| 5,392,151 Method and apparatus for steering light | 88 | 1994 | |
| 5,523,878 Self-assembled monolayer coating for micro-mechanical devices | 93 | 1994 | |
| 5,504,504 Method of reducing the visual impact of defects present in a spatial light modulator display | 137 | 1994 | |
| 5,485,304 Support posts for micro-mechanical devices | 118 | 1994 | |
| 5,483,307 Wide field of view head-mounted display | 112 | 1994 | |
| 5,490,009 Enhanced resolution for digital micro-mirror displays | 116 | 1994 | |
| 5,519,450 Graphics subsystem for digital television | 62 | 1994 | |
| 5,516,125 Baffled collet for vacuum pick-up of a semiconductor die | 55 | 1994 | |
| 5,463,347 MOS uni-directional, differential voltage amplifier capable of amplifying signals having input common-mode voltage beneath voltage of lower supply and integrated circuit substrate | 53 | 1994 | |
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| 5,508,841 Spatial light modulator based phase contrast image projection system | 79 | 1995 | |
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| 5,506,171 Method of clean up of a patterned metal layer | 54 | 1995 | |
| 5,523,881 Optical correlator using light phase modulation and two reflective spatial light modulators | 59 | 1995 | |
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| 4,257,016 Piezo-optic, total internal reflection modulator | 47 | 1979 | |
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|||
| 5,150,205 Actuated mirror optical intensity modulation | 57 | 1989 | |
| 5,126,836 Actuated mirror optical intensity modulation | 86 | 1989 | |
| 5,185,660 Actuated mirror optical intensity modulation | 75 | 1990 | |
| 5,085,497 Method for fabricating mirror array for optical projection system | 77 | 1990 | |
| 5,260,798 Pixel intensity modulator | 53 | 1992 | |
|
|
|||
| 5,768,009 Light valve target comprising electrostatically-repelled micro-mirrors | 94 | 1997 | |
| 6,163,026 Chemically stabilized light selective element for imaging applications | 42 | 1998 | |
| 5,926,309 Light valve target comprising electrostatically-repelled micro-mirrors | 90 | 1998 | |
| 6,123,985 Method of fabricating a membrane-actuated charge controlled mirror (CCM) | 91 | 1998 | |
| 6,346,430 Packaged integrated processor and spatial light modulator | 41 | 2000 | |
|
|
|||
| 4,389,096 Image display apparatus of liquid crystal valve projection type | 270 | 1981 | |
| 5,299,289 Polymer dispersed liquid crystal panel with diffraction grating | 133 | 1992 | |
| 5,510,758 Multilayer microstrip wiring board with a semiconductor device mounted thereon via bumps | 154 | 1994 | |
| 5,920,418 Diffractive optical modulator and method for producing the same, infrared sensor including such a diffractive optical modulator and method for producing the same, and display device including such a diffractive optical modulator | 106 | 1995 | |
| 5,949,570 Diffractive optical modulator and method for producing the same, infrared sensor including such a diffractive optical modulator and method for producing the same, and display device including such a diffractive optical modulator | 69 | 1997 | |
|
|
|||
| 5,009,473 Low vibration resonant scanning unit for miniature optical display apparatus | 61 | 1989 | |
| 5,136,695 Apparatus and method for updating a remote video display from a host computer | 68 | 1989 | |
| D334742 Miniature video display | 48 | 1990 | |
| D337320 Combined display and headband for miniature video display unit | 66 | 1990 | |
| D334557 Combined headband and attachment arm for a miniature video display box | 63 | 1990 | |
|
|
|||
| 5,121,343 3-D stereo computer output printer | 80 | 1990 | |
| 5,165,013 3-D stereo pen plotter | 63 | 1990 | |
| 5,221,982 Polarizing wavelength separator | 160 | 1991 | |
| 5,245,686 Method of fabricating an image plane translator device and apparatus incorporating such device | 51 | 1991 | |
| 5,502,481 Desktop-based projection display system for stereoscopic viewing of displayed imagery over a wide field of view | 101 | 1994 | |
|
|
|||
| 4,896,325 Multi-section tunable laser with differing multi-element mirrors | 133 | 1988 | |
| 5,233,460 Method and means for reducing speckle in coherent laser pulses | 87 | 1992 | |
| 5,493,177 Sealed micromachined vacuum and gas filled devices | 115 | 1993 | |
| 5,726,480 Etchants for use in micromachining of CMOS Microaccelerometers and microelectromechanical devices and method of making the same | 260 | 1995 | |
| 6,210,988 Polycrystalline silicon germanium films for forming micro-electromechanical systems | 204 | 2000 | |
|
|
|||
| 4,561,044 Lighting device for a display panel of an electronic device | 70 | 1984 | |
| 4,663,670 Television receiver having a liquid crystal display device | 57 | 1984 | |
| 4,652,932 Liquid crystal display television receiver | 77 | 1985 | |
| 4,646,158 Liquid crystal television receiver | 83 | 1985 | |
|
|
|||
| 5,629,801 Diffraction grating light doubling collection system | 79 | 1995 | |
| 5,661,592 Method of making and an apparatus for a flat diffraction grating light valve | 219 | 1995 | |
| 5,798,743 Clear-behind matrix addressing for display systems | 71 | 1995 | |
| 5,731,802 Time-interleaved bit-plane, pulse-width-modulation digital display system | 98 | 1996 | |
|
|
|||
| 4,817,850 Repairable flip-chip bumping | 67 | 1988 | |
| 5,031,144 Ferroelectric memory with non-destructive readout including grid electrode between top and bottom electrodes | 62 | 1990 | |
| 5,426,072 Process of manufacturing a three dimensional integrated circuit from stacked SOI wafers using a temporary silicon substrate | 233 | 1993 | |
| 5,523,628 Apparatus and method for protecting metal bumped integrated circuit chips during processing and for providing mechanical support to interconnected chips | 166 | 1994 | |
|
|
|||
| 5,258,325 Method for manufacturing a semiconductor device using a circuit transfer film | 182 | 1992 | |
| 5,713,652 Slide projector mountable light valve display | 51 | 1994 | |
| 5,815,126 Monocular portable communication and display system | 141 | 1996 | |
| 6,097,352 Color sequential display panels | 156 | 1997 | |
|
|
|||
| 5,340,772 Method of increasing the layout efficiency of dies on a wafer and increasing the ratio of I/O area to active area per die | 56 | 1992 | |
| 5,399,898 Multi-chip semiconductor arrangements using flip chip dies | 343 | 1992 | |
| 5,438,477 Die-attach technique for flip-chip style mounting of semiconductor dies | 158 | 1993 | |
| 6,396,789 Data storage system and methods using diffractive near-field optics | 47 | 1998 | |
|
|
|||
| 5,689,361 Apparatus and method for femtosecond pulse compression based on selective attenuation of a portion of an input power spectrum | 72 | 1996 | |
| 5,745,271 Attenuation device for wavelength multiplexed optical fiber communications | 134 | 1996 | |
| 5,912,094 Method and apparatus for making a micro device | 53 | 1997 | |
| 6,356,689 Article comprising an optical cavity | 69 | 2000 | |
|
|
|||
| 4,700,276 Ultra high density pad array chip carrier | 87 | 1986 | |
| 5,115,344 Tunable diffraction grating | 62 | 1990 | |
| 5,157,304 Field emission device display with vacuum seal | 70 | 1990 | |
| 5,486,946 Integrated electro-optic package for reflective spatial light modulators | 84 | 1994 | |
|
|
|||
| 4,751,509 Light valve for use in a color display unit with a diffraction grating assembly included in the valve | 84 | 1986 | |
| 5,534,883 Video signal interface | 121 | 1993 | |
| 5,508,561 Apparatus for forming a double-bump structure used for flip-chip mounting | 140 | 1994 | |
| 5,841,929 Light wavelength filtering circuit and manufacturing method thereof | 38 | 1996 | |
|
|
|||
| 5,919,548 Chemical-mechanical polishing of recessed microelectromechanical devices | 145 | 1997 | |
| 5,963,788 Method for integrating microelectromechanical devices with electronic circuitry | 163 | 1997 | |
| 6,012,336 Capacitance pressure sensor | 98 | 1998 | |
| 6,290,859 Tungsten coating for improved wear resistance and reliability of microelectromechanical devices | 49 | 1999 | |
|
|
|||
| 4,636,866 Personal liquid crystal image display | 163 | 1983 | |
| 5,453,803 Low profile liquid crystal projector and method of using same | 54 | 1994 | |
| 5,704,700 Laser illuminated image projection system and method of using same | 91 | 1995 | |
| 6,569,717 Semiconductor device production method, electro-optical device production method, semiconductor device, and electro-optical device | 60 | 2000 | |
|
|
|||
| 5,311,360 Method and apparatus for modulating a light beam | 558 | 1992 | |
| 5,459,610 Deformable grating apparatus for modulating a light beam and including means for obviating stiction between grating elements and underlying substrate | 292 | 1993 | |
| 5,677,783 Method of making a deformable grating apparatus for modulating a light beam and including means for obviating stiction between grating elements and underlying substrate | 98 | 1995 | |
| 6,219,015 Method and apparatus for using an array of grating light valves to produce multicolor optical images | 76 | 1996 | |
|
|
|||
| 4,205,428 Planar liquid crystal matrix array chip | 48 | 1978 | |
| 4,511,220 Laser target speckle eliminator | 90 | 1982 | |
| 4,649,085 Cryogenic glass-to-metal seal | 52 | 1984 | |
| 4,698,602 Micromirror spatial light modulator | 89 | 1985 | |
|
|
|||
| 5,835,256 Reflective spatial light modulator with encapsulated micro-mechanical elements | 324 | 1996 | |
| 6,046,840 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements | 308 | 1998 | |
| 6,290,864 Fluoride gas etching of silicon with improved selectivity | 78 | 1999 | |
| 6,172,797 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements | 160 | 1999 | |
|
|
|||
| 6,163,402 Rear projection screen | 73 | 1998 | |
| 6,310,018 Fluorinated solvent compositions containing hydrogen fluoride | 59 | 2000 | |
| 6,438,954 Multi-directional thermal actuator | 80 | 2001 | |
|
|
|||
| 4,327,966 Variable attenuator for laser radiation | 58 | 1980 | |
| 4,327,411 High capacity elastic store having continuously variable delay | 58 | 1980 | |
| 4,717,066 Method of bonding conductors to semiconductor devices | 129 | 1986 | |
|
|
|||
| 5,206,829 Thin film ferroelectric electro-optic memory | 35 | 1990 | |
| 5,832,148 Electrically controlled wavelength multiplexing waveguide filter | 74 | 1996 | |
| 6,069,392 Microbellows actuator | 78 | 1998 | |
|
|
|||
| 4,809,078 Liquid crystal television receiver | 84 | 1984 | |
| 4,722,593 Liquid-crystal projector with light beam reduction lens array for improved brightness of image outer portions | 99 | 1986 | |
| 4,803,560 Liquid-crystal television receiver with cassette tape recorder | 61 | 1987 | |
|
|
|||
| 5,221,400 Method of making a microaccelerometer having low stress bonds and means for preventing excessive z-axis deflection | 47 | 1990 | |
| 5,220,200 Provision of substrate pillars to maintain chip standoff | 91 | 1991 | |
| 5,427,975 Method of micromachining an integrated sensor on the surface of a silicon wafer | 107 | 1993 | |
|
|
|||
| 4,558,171 Hermetic enclosure for electronic components with an optionally transparent cover and a method of making the same | 60 | 1984 | |
| 4,687,326 Integrated range and luminance camera | 100 | 1985 | |
| 5,367,585 Integrated microelectromechanical polymeric photonic switch | 83 | 1993 | |
|
|
|||
| 4,893,509 Method and product for fabricating a resonant-bridge microaccelerometer | 113 | 1988 | |
| 5,233,874 Active microaccelerometer | 86 | 1991 | |
| 5,953,161 Infra-red imaging system using a diffraction grating array | 60 | 1998 | |
|
|
|||
| 5,119,204 Liquid crystal television set having driving circuit on peripheral portion and method of fabrication of image display section | 90 | 1989 | |
| 4,970,575 Semiconductor device | 81 | 1990 | |
| 5,868,854 Method and apparatus for processing samples | 52 | 1992 | |
|
|
|||
| 5,113,285 Full color three-dimensional flat panel display | 117 | 1990 | |
| 5,418,584 Retroreflective array virtual image projection screen | 100 | 1992 | |
| 5,895,233 Integrated silicon vacuum micropackage for infrared devices | 125 | 1997 | |
|
|
|||
| 5,168,401 Brightness conserving optical system for modifying beam symmetry | 92 | 1991 | |
| 5,920,411 Optical multiplexing/demultiplexing device | 67 | 1997 | |
| 6,122,299 Angled distributed reflector optical device with enhanced light confinement | 59 | 1997 | |
|
|
|||
| 4,256,787 Orientation of ordered liquids and their use in devices | 58 | 1978 | |
| 5,310,624 Integrated circuit micro-fabrication using dry lithographic processes | 58 | 1992 | |
| 5,742,373 Color microdisplays and methods of manufacturing same | 55 | 1995 | |
|
|
|||
| 4,934,773 Miniature video display system | 242 | 1987 | |
| 5,023,905 Pocket data receiver with full page visual display | 92 | 1988 | |
| 5,048,077 Telephone handset with full-page visual display | 128 | 1988 | |
|
|
|||
| 4,355,463 Process for hermetically encapsulating semiconductor devices | 118 | 1980 | |
| 4,882,683 Cellular addressing permutation bit map raster graphics architecture | 81 | 1987 | |
| 6,313,901 Liquid crystal display fabrication process using a final rapid thermal anneal | 30 | 1999 | |
|
|
|||
| 6,222,954 Fault-tolerant fiber-optical beam control modules | 102 | 1999 | |
| 6,525,863 Multi-technology multi-beam-former platform for robust fiber-optical beam control modules | 56 | 2000 | |
| 6,563,974 High resolution fault-tolerant fiber-optical beam control modules | 43 | 2001 | |
|
|
|||
| 5,835,255 Visible spectrum modulator arrays | 460 | 1994 | |
| 5,986,796 Visible spectrum modulator arrays | 446 | 1996 | |
| 6,055,090 Interferometric modulation | 423 | 1999 | |
|
|
|||
| 5,024,494 Focussed light source pointer for three dimensional display | 71 | 1990 | |
| 5,450,219 Raster following telecentric illumination scanning system for enhancing light throughout in light valve projection systems | 62 | 1993 | |
| 5,668,611 Full color sequential image projection system incorporating pulse rate modulated illumination | 108 | 1995 | |
|
|
|||
| 4,417,386 Method for mounting a semiconductor device in a housing | 45 | 1980 | |
| 4,804,641 Method for limiting chippage when sawing a semiconductor wafer | 63 | 1986 | |
| 5,808,323 Microoptical device with mirrors | 62 | 1996 | |
|
|
|||
| 4,623,219 Real-time high-resolution 3-D large-screen display using laser-activated liquid crystal light valves | 74 | 1985 | |
| 5,208,891 Fiber-optic viewgraph projector | 42 | 1991 | |
| 5,230,005 Electronic tuning of a broadband laser | 48 | 1991 | |
|
|
|||
| 5,058,992 Method for producing a display with a diffraction grating pattern and a display produced by the method | 76 | 1988 | |
| 5,132,812 Method of manufacturing display having diffraction grating patterns | 59 | 1990 | |
| 5,301,062 Display having diffraction grating pattern | 65 | 1992 | |
|
|
|||
| 4,915,479 Liquid crystal display illumination system | 118 | 1987 | |
| 5,060,058 Modulation system for projection display | 66 | 1989 | |
| 5,442,414 High contrast illumination system for video projector | 139 | 1994 | |
|
|
|||
| 6,300,148 Semiconductor structure with a backside protective layer and backside probes and a method for constructing the structure | 40 | 1998 | |
| 6,274,469 Process using a plug as a mask for a gate | 41 | 2000 | |
|
|
|||
| 6,271,145 Method for making a micromachine | 48 | 1999 | |
| 6,197,610 Method of making small gaps for small electrical/mechanical devices | 65 | 2000 | |
|
|
|||
| 5,469,302 Electrostrictive mirror actuator for use in optical projection system | 88 | 1994 | |
| 5,506,720 Method for manufacturing an electrodisplacive actuated mirror array | 64 | 1994 | |
|
|
|||
| 5,554,304 Process for producing a micromotion mechanical structure | 62 | 1995 | |
| 5,825,443 Color liquid crystal display with three dichroic mirrors reflecting in different directions to three pixels which reflect to common optics | 43 | 1997 | |
|
|
|||
| 5,231,432 Projector utilizing liquid crystal light-valve and color selection by diffraction | 86 | 1991 | |
| 5,303,043 Projection television display utilizing Bragg diffraction cell for producing horizontal scan | 45 | 1992 | |
|
|
|||
| 5,216,544 Beam-combining laser beam source device | 45 | 1992 | |
| 6,195,196 Array-type exposing device and flat type display incorporating light modulator and driving method thereof | 304 | 1999 | |
|
|
|||
| 4,824,200 Optical branching filter | 75 | 1987 | |
| 5,475,236 Semiconductor chip for mounting on a semiconductor package substrate by a flip-clip process | 144 | 1995 | |
|
|
|||
| 5,519,251 Semiconductor device and method of producing the same | 94 | 1993 | |
| 5,508,565 Semiconductor device having a plurality of chips having identical circuit arrangement sealed in package | 121 | 1994 | |
|
|
|||
| 4,949,148 Self-aligning integrated circuit assembly | 101 | 1989 | |
| 5,189,505 Flexible attachment flip-chip assembly | 100 | 1991 | |
|
|
|||
| 5,508,558 High density, high speed, semiconductor interconnect using-multilayer flexible substrate with unsupported central portion | 42 | 1993 | |
| 2001/0019,454 Projection lens and system | 46 | 2001 | |
|
|
|||
| 5,999,319 Reconfigurable compound diffraction grating | 83 | 1998 | |
| 6,282,213 Tunable diode laser with fast digital line selection | 70 | 1998 | |
|
|
|||
| 5,043,917 Control method and apparatus therefor | 50 | 1989 | |
| 5,185,823 Waveguide type optical device | 39 | 1991 | |
|
|
|||
| 5,455,445 Multi-level semiconductor structures having environmentally isolated elements | 114 | 1994 | |
| 5,955,771 Sensors for use in high vibrational applications and methods for fabricating same | 98 | 1997 | |
|
|
|||
| 5,486,698 Thermal imaging system with integrated thermal chopper | 86 | 1994 | |
| 5,512,748 Thermal imaging system with a monolithic focal plane array and method | 90 | 1994 | |
|
|
|||
| 4,561,011 Dimensionally stable semiconductor device | 89 | 1983 | |
| 5,093,281 method for manufacturing semiconductor devices | 48 | 1989 | |
|
|
|||
| 5,461,547 Flat panel display lighting system | 114 | 1993 | |
| 5,485,354 Flat panel display lighting system | 134 | 1993 | |
|
|
|||
| 6,268,952 Micromechanical light steering optical switch | 89 | 1999 | |
| 6,169,624 Achromatic optical modulators | 57 | 1999 | |
|
|
|||
| 5,287,215 Membrane light modulation systems | 167 | 1991 | |
| 5,471,341 Membrane light modulating systems | 156 | 1993 | |
|
|
|||
| 4,761,253 Method and apparatus for producing a relief pattern with a microscopic structure, in particular having an optical diffraction effect | 78 | 1987 | |
| 5,101,184 Diffraction element and optical machine-reading device | 107 | 1989 | |
|
|
|||
| 5,113,272 Three dimensional semiconductor display using liquid crystal | 113 | 1990 | |
| 5,307,185 Liquid crystal projection display with complementary color dye added to longest wavelength imaging element | 58 | 1992 | |
|
|
|||
| 6,057,520 Arc resistant high voltage micromachined electrostatic switch | 117 | 1999 | |
| 6,229,683 High voltage micromachined electrostatic switch | 104 | 1999 | |
|
|
|||
| 5,198,895 Holographic head-up display | 50 | 1991 | |
| 5,315,423 Wavelength multiplexed two dimensional image transmission through single mode optical fiber | 70 | 1992 | |
|
|
|||
| 5,673,139 Microelectromechanical television scanning device and method for making the same | 311 | 1993 | |
| 5,914,801 Microelectromechanical devices including rotating plates and related methods | 108 | 1996 | |
|
|
|||
| 5,066,614 Method of manufacturing a leadframe having conductive elements preformed with solder bumps | 89 | 1990 | |
| 5,552,635 High thermal emissive semiconductor device package | 150 | 1995 | |
|
|
|||
| 6,096,656 Formation of microchannels from low-temperature plasma-deposited silicon oxynitride | 149 | 1999 | |
| 2002/0105,725 Electrically-programmable optical processor with enhanced resolution | 69 | 2000 | |
|
|
|||
| 4,398,798 Image rotating diffraction grating | 62 | 1980 | |
| 4,435,041 Chromatic aberration correction in a multiwavelength light beam deflection system | 60 | 1982 | |
|
|
|||
| 4,926,241 Flip substrate for chip mount | 146 | 1988 | |
| 5,039,628 Flip substrate for chip mount | 78 | 1990 | |
|
|
|||
| 5,214,308 Substrate for packaging a semiconductor device | 205 | 1991 | |
| 5,298,460 Substrate for packaging a semiconductor device | 43 | 1992 | |
|
|
|||
| 5,126,812 Monolithic micromechanical accelerometer | 102 | 1990 | |
| 5,837,562 Process for bonding a shell to a substrate for packaging a semiconductor | 110 | 1995 | |
|
|
|||
| 5,606,447 Planar type mirror galvanometer and method of manufacture | 134 | 1995 | |
| 5,912,608 Planar type electromagnetic actuator | 93 | 1997 | |
|
|
|||
| 4,361,384 High luminance miniature display | 122 | 1980 | |
| 5,319,214 Infrared image projector utilizing a deformable mirror device spatial light modulator | 73 | 1992 | |
|
|
|||
| 4,426,768 Ultra-thin microelectronic pressure sensors | 64 | 1981 | |
| 4,440,839 Method of forming laser diffraction grating for beam sampling device | 69 | 1983 | |
|
|
|||
| 4,195,915 Liquid crystal image projector system | 80 | 1978 | |
| 4,836,649 Optical layout for a three light valve full-color projector employing a dual relay lens system and a single projection lens | 94 | 1985 | |
|
|
|||
| 6,115,168 Integrated optical retroreflecting modulator | 43 | 1998 | |
|
|
|||
| 5,320,709 Method for selective removal of organometallic and organosilicon residues and damaged oxides using anhydrous ammonium fluoride solution | 80 | 1993 | |
|
|
|||
| 4,655,539 Hologram writing apparatus and method | 65 | 1984 | |
|
|
|||
| 4,952,925 Projectable passive liquid-crystal flat screen information centers | 60 | 1988 | |
|
|
|||
| 6,229,650 Optical imaging head having a multiple writing bean source | 59 | 1999 | |
|
|
|||
| 6,075,632 Optical noise monitor | 49 | 1997 | |
|
|
|||
| 5,239,806 Thermoplastic semiconductor package and method of producing it | 53 | 1992 | |
|
|
|||
| 5,847,859 Optical reading device | 60 | 1996 | |
|
|
|||
| 5,694,740 Micromachined device packaged to reduce stiction | 78 | 1996 | |
|
|
|||
| 5,798,805 Projection type display apparatus | 66 | 1995 | |
|
|
|||
| 5,508,840 Light modulator | 52 | 1993 | |
|
|
|||
| 6,040,748 Magnetic microswitch | 55 | 1998 | |
|
|
|||
| 5,500,761 Micromechanical modulator | 324 | 1994 | |
|
|
|||
| 5,473,512 Electronic device package having electronic device boonded, at a localized region thereof, to circuit board | 105 | 1994 | |
|
|
|||
| 5,137,836 Method of manufacturing a repairable multi-chip module | 113 | 1991 | |
|
|
|||
| 5,192,864 Two dimensional display produced by one dimensional scanned emitters | 48 | 1991 | |
|
|
|||
| 4,930,043 Closed-loop capacitive accelerometer with spring constraint | 64 | 1989 | |
|
|
|||
| 4,772,094 Optical stereoscopic system and prism window | 139 | 1985 | |
|
|
|||
| 5,371,618 Color liquid crystal display employing dual cells driven with an EXCLUSIVE OR relationship | 151 | 1993 | |
|
|
|||
| 4,902,083 Low vibration resonant scanning unit for miniature optical display apparatus | 146 | 1988 | |
|
|
|||
| 5,285,105 Semiconductor die packages having lead support frame | 49 | 1992 | |
|
|
|||
| 6,445,502 Variable blazed grating | 62 | 2001 | |
|
|
|||
| 5,347,378 Fast switching color filters for frame-sequential video using ferroelectric liquid crystal color-selective filters | 131 | 1993 | |
|
|
|||
| 4,711,526 Attenuating beam splitter | 46 | 1986 | |
|
|
|||
| 5,391,881 Ionizing radiation imaging device | 52 | 1993 | |
|
|
|||
| 4,797,918 Subscription control for television programming | 56 | 1987 | |
|
|
|||
| 5,439,731 Interconnect structures containing blocked segments to minimize stress migration and electromigration damage | 72 | 1994 | |
|
|
|||
| 2002/0015,230 Controllable diffractive grating array with perpendicular diffraction | 50 | 2001 | |
|
|
|||
| 5,212,115 Method for microelectronic device packaging employing capacitively coupled connections | 53 | 1991 | |
|
|
|||
| 5,359,349 VDU workstation in a vehicle | 97 | 1991 | |
|
|
|||
| 6,071,652 Fabricating optical elements using a photoresist formed from contact printing of a gray level mask | 77 | 1998 | |
|
|
|||
| 4,829,365 Autostereoscopic display with illuminating lines, light valve and mask | 112 | 1987 | |
|
|
|||
| 5,903,243 Compact, body-mountable field emission display device, and display panel having utility for use therewith | 46 | 1997 | |
|
|
|||
| 4,915,463 Multilayer diffraction grating | 91 | 1988 | |
|
|
|||
| 5,074,947 Flip chip technology using electrically conductive polymers and dielectrics | 209 | 1989 | |
|
|
|||
| 5,129,716 Stereoscopic video image display appliance wearable on head like spectacles | 118 | 1990 | |
|
|
|||
| 5,491,612 Three-dimensional modular assembly of integrated circuits | 142 | 1995 | |
|
|
|||
| 6,254,792 Isotropic dry cleaning process for noble metal integrated circuit structures | 52 | 1998 | |
|
|
|||
| 4,765,865 Silicon etch rate enhancement | 51 | 1987 | |
|
|
|||
| 5,296,891 Illumination device | 431 | 1992 | |
|
|
|||
| 5,534,107 UV-enhanced dry stripping of silicon nitride films | 75 | 1994 | |
|
|
|||
| 4,999,308 Method of making thin film solar cell array | 48 | 1989 | |
|
|
|||
| 5,457,567 Laser scanner having improved frequency characteristics | 43 | 1992 | |
|
|
|||
| 5,404,365 Polarized light coherent combining laser apparatus | 42 | 1994 | |
|
|
|||
| 5,068,205 Header mounted chemically sensitive ISFET and method of manufacture | 58 | 1989 | |
|
|
|||
| 4,978,202 Laser scanning system for displaying a three-dimensional color image | 99 | 1989 | |
|
|
|||
| 6,062,461 Process for bonding micromachined wafers using solder | 104 | 1998 | |
|
|
|||
| 4,185,891 Laser diode collimation optics | 123 | 1977 | |
|
|
|||
| 5,361,131 Optical displacement measuring apparatus utilizing Fourier transform method | 47 | 1992 | |
|
|
|||
| 4,924,413 Color conversion apparatus and method | 71 | 1987 | |
|
|
|||
| 5,189,404 Display apparatus with rotatable display screen | 114 | 1991 | |
|
|
|||
| 4,982,265 Semiconductor integrated circuit device and method of manufacturing the same | 244 | 1988 | |
|
|
|||
| 5,188,280 Method of bonding metals, and method and apparatus for producing semiconductor integrated circuit device using said method of bonding metals | 72 | 1991 | |
|
|
|||
| 6,359,333 Wafer-pair having deposited layer sealed chambers | 55 | 1998 | |
|
|
|||
| 6,091,521 Light collection from diffractive displays | 40 | 1999 | |
|
|
|||
| 5,467,106 Retractable face-up LCD monitor with off-monitor power supply and back-EMF braking | 123 | 1994 | |
|
|
|||
| 4,343,535 Liquid crystal light valve | 72 | 1979 | |
|
|
|||
| 5,903,395 Personal visual display system | 94 | 1995 | |
|
|
|||
| 4,943,815 Laser printer with light-exposure prevention | 53 | 1989 | |
|
|
|||
| 5,291,317 Holographic diffraction grating patterns and methods for creating the same | 120 | 1990 | |
|
|
|||
| 6,124,145 Micromachined gas-filled chambers and method of microfabrication | 47 | 1998 | |
|
|
|||
| 6,421,179 Wavelength division multiplexing system and method using a reconfigurable diffraction grating | 51 | 1999 | |
|
|
|||
| 5,915,168 Lid wafer bond packaging and micromachining | 166 | 1998 | |
|
|
|||
| 5,262,000 Method for making micromechanical switch | 114 | 1992 | |
|
|
|||
| 5,978,127 Light phase grating device | 77 | 1997 | |
|
|
|||
| 4,462,046 Machine vision system utilizing programmable optical parallel processing | 86 | 1982 | |
|
|
|||
| 6,090,717 High density plasma etching of metallization layer using chlorine and nitrogen | 54 | 1996 | |
|
|
|||
| 4,984,824 Document with an optical diffraction safety element | 96 | 1989 | |
|
|
|||
| 4,897,708 Semiconductor wafer array | 199 | 1986 | |
|
|
|||
| 5,802,222 Color image generation systems and applications | 95 | 1996 | |
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| 4,982,184 Electrocrystallochromic display and element | 338 | 1989 | |
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| 4,456,338 Electronically tuneable light source | 42 | 1982 | |
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| 5,696,560 Motion picture distribution system | 55 | 1995 | |
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| 4,814,759 Flat panel display monitor apparatus | 143 | 1987 | |
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| 5,801,074 Method of making an air tight cavity in an assembly package | 67 | 1996 | |
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| 5,691,836 Optically addressed spatial light modulator and method | 49 | 1995 | |
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| 4,487,677 Electrolytic recovery system for obtaining titanium metal from its ore | 45 | 1983 | |
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| 5,182,665 Diffractive light modulator | 136 | 1990 | |
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|||
| 4,460,907 Electrographic imaging apparatus | 48 | 1982 | |
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|||
| 5,126,826 Light-emitting or receiving device and method for preparing the same | 41 | 1990 | |
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| 5,249,245 Optoelectroinc mount including flexible substrate and method for making same | 122 | 1992 | |
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| 4,707,064 Optical mixing/demixing device | 79 | 1986 | |
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| 5,191,405 Three-dimensional stacked LSI | 143 | 1989 | |
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| 4,641,193 Video display apparatus and method | 58 | 1984 | |
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| 5,319,668 Tuning system for external cavity diode laser | 148 | 1992 | |
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|||
| 5,517,357 Anti-vibration optical device | 40 | 1994 | |
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| 5,420,655 Color projection system employing reflective display devices and prism illuminators | 84 | 1992 | |
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| 6,261,494 Method of forming plastically deformable microstructures | 55 | 1998 | |
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|||
| 5,170,283 Silicon spatial light modulator | 153 | 1991 | |
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| 5,844,711 Tunable spatial light modulator | 66 | 1997 | |
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| 6,418,152 Multi-amplifier, high power mode locked laser | 41 | 2000 | |
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| 6,497,490 Laser beam attenuator and method of attenuating a laser beam | 47 | 1999 | |
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| 5,640,216 Liquid crystal display device having video signal driving circuit mounted on one side and housing | 126 | 1995 | |
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| 5,151,724 Dynamic holographic display with cantilever | 61 | 1991 | |
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| 6,154,259 Multi-beam laser scanning display system with speckle elimination | 108 | 1997 | |
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| 5,757,536 Electrically-programmable diffraction grating | 147 | 1995 | |
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| 5,022,750 Active matrix reflective projection system | 92 | 1989 | |
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| 4,408,884 Optical measurements of fine line parameters in integrated circuit processes | 133 | 1981 | |
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| 4,467,342 Multi-chip imager | 75 | 1982 | |
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| 5,334,991 Dual image head-mounted display | 126 | 1992 | |
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| 4,338,660 Relational break signal generating device | 69 | 1979 | |
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| 5,219,794 Semiconductor integrated circuit device and method of fabricating same | 100 | 1992 | |
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| 5,606,181 Edge emitting type light emitting diode array heads | 86 | 1995 | |
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| 5,151,763 Acceleration and vibration sensor and method of making the same | 112 | 1990 | |
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| 5,357,803 Micromachined microaccelerometer for measuring acceleration along three axes | 51 | 1992 | |
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| 5,075,940 Process for producing solid electrolytic capacitors | 49 | 1991 | |
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| 5,404,485 Flash file system | 429 | 1993 | |
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| 4,721,629 Method of manufacturing photovoltaic device | 47 | 1985 | |
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| 5,281,957 Portable computer and head mounted display | 219 | 1991 | |
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| 4,763,975 Optical system with bright light output | 98 | 1987 | |
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| 5,712,649 Head-mounted image display | 87 | 1996 | |
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|||
| 5,942,791 Micromachined devices having microbridge structure | 42 | 1997 | |
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| 5,041,395 Method of encapsulating an integrated circuit using a punched metal grid attached to a perforated dielectric strip | 102 | 1990 | |
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|||
| 5,179,367 Suspended display apparatus | 65 | 1990 | |
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|||
| 5,926,318 Biocular viewing system with intermediate image planes for an electronic display device | 65 | 1998 | |
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| 5,544,306 Flexible dram access in a frame buffer memory and system | 126 | 1994 | |
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| 5,164,019 Monolithic series-connected solar cells having improved cell isolation and method of making same | 77 | 1991 | |
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|||
| 5,003,300 Head mounted display for miniature video display system | 253 | 1988 | |
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|||
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|||
| 5,454,160 Apparatus and method for stacking integrated circuit devices | 121 | 1993 | |
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|
|||
| 5,455,455 Methods for producing packaged integrated circuit devices and packaged integrated circuit devices produced thereby | 102 | 1993 | |
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|
|||
| 5,491,715 Automatic antenna tuning method and circuit | 204 | 1993 | |
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|
|||
| 5,453,747 Transponder systems for automatic identification purposes | 143 | 1994 | |
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|||
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|||
| 4,945,773 Force transducer etched from silicon | 49 | 1989 | |
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|||
| 5,170,269 Programmable optical interconnect system | 78 | 1991 | |
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|
|||
| 5,315,418 Two path liquid crystal light valve color display with light coupling lens array disposed along the red-green light path | 148 | 1992 | |
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|
|||
| 5,663,817 Projector of narrow field moving images | 50 | 1994 | |
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|||
| 6,241,143 Producing method of a film-type transmission line and method of connecting to an existing line | 42 | 1999 | |
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|||
| 5,892,505 Image viewing apparatus and method | 44 | 1997 | |
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|||
| 5,886,675 Autostereoscopic display system with fan-out multiplexer | 77 | 1995 | |
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|
|||
| 5,481,133 Three-dimensional multichip package | 177 | 1994 | |
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|
|||
| 5,339,177 Incoherent/coherent source array for multiplexed holographic recording and readout | 50 | 1992 | |
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|
|||
| 5,155,604 Coated paper sheet embossed with a diffraction or holographic pattern | 108 | 1990 | |
|
|
|||
| 5,321,416 Head-mounted visual display apparatus | 121 | 1992 | |
|
|
|||
| 5,539,422 Head mounted display system | 105 | 1993 | |
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|
|||
| 5,862,164 Apparatus to transform with high efficiency a single frequency, linearly polarized laser beam into beams with two orthogonally polarized frequency components orthogonally polarized | 56 | 1996 | |
|
|
|||
| 4,331,972 Light valve, light valve display, and method | 44 | 1978 | |
| 4,571,041 Three dimensional projection arrangement | 56 | 1984 | |
| 4,661,828 Optical imaging head | 46 | 1985 | |
| 4,744,633 Stereoscopic viewing system and glasses | 59 | 1986 | |
| 4,807,965 Apparatus for three-dimensional viewing | 64 | 1987 | |
| 4,940,309 Tessellator | 44 | 1989 | |
| 5,354,416 Dry etching method | 52 | 1990 | |
| 5,347,433 Collimated beam of light and systems and methods for implementation thereof | 66 | 1992 | |
| 5,281,887 Two independent spatial variable degree of freedom wavefront modulator | 47 | 1992 | |
| 5,493,439 Enhanced surface deformation light modulator | 100 | 1992 | |
| 5,357,369 Wide-field three-dimensional viewing system | 89 | 1992 | |
| 5,408,123 Functional chip to be used while stacked on another chip and stack structure formed by the same | 56 | 1994 | |
| 5,623,361 Enhanced wavefront phase modulator device | 47 | 1995 | |
| 5,661,593 Linear electrostatic modulator | 54 | 1995 | |
| 5,707,160 Infrared based computer input devices including keyboards and touch pads | 61 | 1996 | |
| 5,773,473 Creatine supplement | 26 | 1997 | |
| 6,177,980 High-throughput, maskless lithography system | 278 | 1999 | |
| 6,188,519 Bigrating light valve | 61 | 2000 | |
Patent Citation Ranking
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Apr 5, 2016 |
| Fee | Large entity fee | small entity fee | micro entity fee |
|---|---|---|---|
| Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
| Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
| Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |