System and method for manufacturing semiconductor devices controlled by customer
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Oct 5, 2004
Grant Date -
Feb 20, 2003
app pub date -
Jul 25, 2002
filing date -
Aug 16, 2001
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
In a system for manufacturing semiconductor devices, a customer information management apparatus is connected via a network to a plurality of customer terminals to receive orders from the customer terminals. A manufacturing management apparatus is connected between the customer information management apparatus and processing units and inspection units to control the processing units and the inspection units in accordance with the orders in the customer information management apparatus. Each of the orders includes a designated quantity of lots, a designated substrate, designated processing units, designated recipes thereof, designated inspection units and designated inspection recipes thereof.
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