Dense fluid cleaning centrifugal phase shifting separation process and apparatus

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United States of America Patent

PATENT NO 6802961
APP PUB NO 20030205510A1
SERIAL NO

10221767

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The present invention is an apparatus and process for cleaning substrates using dense fluids under the influence of centrifugal force and dense fluid phase changes. A perforated centrifuge drum operates within a pressure vessel having drains and fill ports. System controls include a high optical sensor, a low optical sensor, a pressure transducer, and a thermocouple. An external dense fluid cleaning and management system exchanges dense fluid and gas with the pressure vessel via the drain and fill ports. Dense fluid centrifugal separations prevent pooling and supercooling of liquid carbon dioxide avoiding recontamination of the substrate. The present invention can perform solvent-aided separation processes including liquid-liquid, liquid-supercritical-fluid, froth flotation and centrifugal phase-shift separations.

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Patent Owner(s)

Patent OwnerAddress
HITACHI HIGH-TECH CORPORATION17-1 TORANOMON 1-CHOME MINATO-KU TOKYO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Jackson, David P 22328 W. Barcotta Dr., Saugus, CA 91350 51 1513

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