Multilayer hinge structures for micro-mirror arrays in projection displays
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United States of America Patent
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Oct 12, 2004
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N/A
app pub date -
Oct 22, 2003
filing date -
Oct 22, 2003
priority date (Note) -
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Abstract
A method and an improved multilayer hinge structure for use in a micromirror device for a spatial light modulator are provided herein. The micromirror device presents a conductive, composite torsion hinge with improved mechanical reliability, achieved by optimizing the geometry of the hinge, which minimizes the amount of residual twist, fixed torsional stiffness and fixed rate of plastic deformation in the mechanically undesirable hinge element. A method and its alternatives are disclosed herein by the present invention for manufacturing such multilayer hinge structure.
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