Interference filter fabrication

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United States of America Patent

PATENT NO 6804060
SERIAL NO

09968163

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Abstract

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An interference filter (10) and a process (100) by which it may be fabricated. A substrate (12, 52, 82) is provided and a working region (56, 84) is defined therein or thereupon. Relative to the horizontal substrate (12, 52, 82), a plurality of vertical layers having differing refractive index are then constructed by applying material into the working region (56, 84) or altering material already in the working region (56, 84). Photo masking and etching processes may be used to selectively remove material in the working region (56, 84) for applying additional material having a differing refractive index. Photo masking and impurity doping processes may be used to selectively change material to have a differing refractive index.

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Patent Owner(s)

Patent OwnerAddress
FIBERA INCP O BOX 3541 SARATOGA CA 95070

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Tsai, John C Saratoga, CA 47 614
Wang, David W Saratoga, CA 45 1367

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