Process control based on tool health data
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United States of America Patent
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Oct 12, 2004
Grant Date -
N/A
app pub date -
Aug 30, 2002
filing date -
Aug 30, 2002
priority date (Note) -
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status (Latency Note)
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Abstract
A method is provided for a process control based on tool health data. The method comprises processing a workpiece using a processing tool, receiving trace data associated with the processing of the workpiece from the processing tool and determining at least one value associated with a health of a portion of the processing tool based on at least a portion of the received trace data. The method further comprises adjusting processing of another workpiece based on the determined health value.
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