Method for lubricating MEMS components
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United States of America Patent
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Oct 19, 2004
Grant Date -
N/A
app pub date -
Jun 4, 2003
filing date -
Jun 4, 2003
priority date (Note) -
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status (Latency Note)
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Abstract
The present invention provides, in one aspect, a method of manufacturing a MEMS assembly. In one embodiment, the method includes mounting a MEMS device, such as a MEMS mirror array, on an assembly substrate. The method further includes coupling an assembly lid to the assembly substrate and over the MEMS device to create an interior of the MEMS assembly housing the MEMS device, whereby the coupling maintains an opening to the interior of the MEMS assembly. Furthermore, the method includes lubricating/passivating the MEMS device through the opening. In addition, a MEMS assembly constructed according to a process of the present invention is also disclosed.
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