Fiber-coupled optical attenuator
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United States of America Patent
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-
Oct 19, 2004
Grant Date -
Jun 12, 2003
app pub date -
Dec 10, 2001
filing date -
Dec 10, 2001
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An optical attenuator has a planar MEMS substrate supporting two optical fibers; an actuator; and a silicon vane actuatable by said actuator for a movement into and out of the optical beam passed between the fibers. The vane is configured to divert at least a portion of the optical beam off the optical axis when the element is moved into the optical beam. The vane has at least one surface disposed non-perpendicularly relative to the optical axis of the beam. The vane may be of a wedged shape.
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