Scheduling method and program for a substrate processing apparatus
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United States of America Patent
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Oct 19, 2004
Grant Date -
Mar 20, 2003
app pub date -
Sep 10, 2002
filing date -
Sep 20, 2001
priority date (Note) -
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Abstract
A method of preparing a schedule for a substrate processing apparatus having a plurality of resources for processing substrates, the schedule determining timing of using each resource for processing the substrate. The method comprising the steps of determining the timing of using each resource in advance of starting an actual processing of the substrates, defining a capacity resource as a resource usable within a maximum quantity of consumption of a consumer item used by the resources, and using the resources in processing the substrates while avoiding a total quantity of the consumer item used by the resources exceeding the maximum quantity of consumption of the capacity resource.
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