Pneumatic actuator with elastomeric membrane and low-power electrostatic flap valve arrangement
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United States of America Patent
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Oct 26, 2004
Grant Date -
Jul 1, 2004
app pub date -
Dec 30, 2002
filing date -
Dec 30, 2002
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An actuator including a pneumatically distended elastomer membrane that is pressurized and depressurized using electrostatically actuated flap valves laminated onto a printed circuit board. The flap valves close only at zero pressure gradients and flows so that elevated closing and hold-off pressures are achieved. Fluid expelled from the elastomer membranes during collapse are vented through a wall of the actuator. An air jet object mover utilizes an array of the pneumatic actuators as valves to open and close air jet vents. A fiber optic micro-switch utilizes pneumatic actuators to position a mirror.
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