Reduced-pressure drying unit and coating film forming method
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United States of America Patent
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Oct 26, 2004
Grant Date -
Mar 20, 2003
app pub date -
Aug 14, 2002
filing date -
Sep 19, 2001
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The invention includes a hermetic container provided with a substrate mount; a vacuum exhauster connected to the hermetic container; a current member; and a current member raising and lowering mechanism. When the current member is raised and lowered as a function of the pressure inside the hermetic container, a liquid flow of the coating solution on the substrate is controlled, thereby controlling the uniformity of the film thickness of the coating solution.
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