Method of coating micro-electromechanical devices
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United States of America Patent
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Oct 26, 2004
Grant Date -
Feb 26, 2004
app pub date -
Aug 22, 2002
filing date -
Aug 22, 2002
priority date (Note) -
Expired
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Abstract
A method for coating a micro-electromechanical systems device with a silane coupling agent by a) mixing the silane coupling agent with a low volatile matrix material in a coating source material container; b) placing the micro-electromechanical systems device in a vacuum deposition chamber which in connection with the coating source material container; c) pumping the vacuum deposition chamber to a predetermined pressure; and maintaining the pressure of the vacuum deposition chamber for a period of time in order to chemically vapor deposit the silane coupling agent on the surface of the micro-electromechanical systems device.
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