Quantitative imaging of dielectric permittivity and tunability
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United States of America Patent
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Oct 26, 2004
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app pub date -
Mar 1, 2002
filing date -
Sep 10, 1999
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Abstract
A near-field scanning microwave microscope images the permittivity and dielectric tunability of bulk and thin film dielectric samples on a length scale of about 1 micron or less. The microscope is sensitive to the linear permittivity, as well as to non-linear dielectric terms, which can be measured as a function of an applied electric field. A versatile finite element model is used for the system, which allows quantitive results to e obtained. The technique is non-destructive and has broadband (0.1-50 GHz) capability.
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