Method and apparatus for automating a microelectronic manufacturing process
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Oct 26, 2004
Grant Date -
Sep 18, 2003
app pub date -
Aug 16, 2002
filing date -
Dec 2, 1997
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
The present invention provides for a method of automating a microelectronic manufacturing process by configuring application objects that implement a domain knowledge for a piece of equipment and implementing a workflow using the application object where the workflow represents a sequence of steps in the microelectronic manufacturing process. The method is embodied in a computer program that is part of a computer system.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully