Coating film forming apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Nov 2, 2004
Grant Date -
May 29, 2003
app pub date -
Nov 19, 2002
filing date -
Nov 26, 2001
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A substrate is horizontally held by a substrate holding portion freely movable in the Y-direction, and a nozzle portion is provided above and opposing the substrate, and movable in X-direction corresponding to the coating liquid feeding region of the substrate. A discharge opening is formed at a lower end of the nozzle portion, and a channel connecting the discharge opening with a coating liquid feed tube coupled to an upper end of the nozzle portion is formed within the discharge opening. At the midstream of the channel, a liquid pool portion larger in diameter than the discharge opening is formed, the inside of which is provided with a filtering member formed by porous bodies blocking the channel. The filtering member forms a pressure loss portion, which absorbs pulsation occurring at the coating liquid feed tube before it reaches the discharge opening.
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Cited Art Landscape
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