Electrical latching of microelectromechanical devices
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United States of America Patent
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Nov 2, 2004
Grant Date -
N/A
app pub date -
Dec 9, 2002
filing date -
Dec 9, 2002
priority date (Note) -
Expired
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Abstract
Methods are disclosed for row and column addressing of an array of microelectromechanical (MEM) devices. The methods of the present invention are applicable to MEM micromirrors or memory elements and allow the MEM array to be programmed and maintained latched in a programmed state with a voltage that is generally lower than the voltage required for electrostatically switching the MEM devices.
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