Silicon micro-machined projection with duct
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United States of America Patent
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Nov 9, 2004
Grant Date -
N/A
app pub date -
Feb 8, 2001
filing date -
Jul 22, 1998
priority date (Note) -
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Abstract
A method of providing a microprojection (180) on the surface of a first material, the microprojection having a base portion adjacent the first material and a remote, or a tip portion, and a duct (182) at least in a region of the tip portion and the method comprising micro-machining the first material to provide the micro-projection duct. Various uses of the microprojection are also disclosed including light guides and cuvettes from micro-analytical systems, microneedles for transdermal fluid delivery or the like.
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