Inductively-coupled toroidal plasma source

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United States of America Patent

PATENT NO 6815633
SERIAL NO

09804650

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Apparatus for dissociating gases includes a plasma chamber comprising a gas. A first transformer having a first magnetic core surrounds a first portion of the plasma chamber and has a first primary winding. A second transformer having a second magnetic core surrounds a second portion of the plasma chamber and has a second primary winding. A first solid state AC switching power supply including one or more switching semiconductor devices is coupled to a first voltage supply and has a first output that is coupled to the first primary winding. A second solid state AC switching power supply including one or more switching semiconductor devices is coupled to a second voltage supply and has a second output that is coupled to the second primary winding. The first solid state AC switching power supply drives a first AC current in the first primary winding. The second solid state AC switching power supply drives a second AC current in the second primary winding. The first AC current and the second AC current induce a combined AC potential inside the plasma chamber that directly forms a toroidal plasma that completes a secondary circuit of the transformer and that dissociates the gas.

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Patent Owner(s)

  • MKS INSTRUMENTS, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bortkiewicz, Andrzej Hamilton, MA 5 348
Bystyak, Ilya M Swampscott, MA 2 174
Chen, Xing Lexington, MA 177 4293
Cowe, Andrew Barnett Andover, MA 2 174
Georgelis, Eric Canton, MA 11 945
Holber, William M Winchester, MA 44 2778

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