Laser alignment target and method
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Nov 9, 2004
Grant Date -
Aug 21, 2003
app pub date -
Feb 20, 2002
filing date -
Feb 20, 2002
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A laser alignment target is provided having a surface that is out of plane with and has substantially the same first reflectivity as an adjacent surface of the semiconductor device, and a sidewall having a second reflectivity different than the first reflectivity. The target provides sidewalls that provide contrast for finding the target despite loss of contrast created by layers of dielectric over the target and use of short wavelength light.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully