Determining composition of mixed dielectrics

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United States of America Patent

PATENT NO 6815974
SERIAL NO

10619170

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Abstract

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Techniques for determining the composition of mixed dielectric layers are disclosed.

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Patent Owner(s)

Patent OwnerAddress
SEMICONDUCTOR DIAGNOSTICS INC3650 SPECTRUM BOULEVARD SUITE 130 TAMPA FL 33612-9401

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
D'Amico, John Temple Terrace, FL 4 98
Jastrzebski, Lubomir L Clearwater, FL 38 1018
Lagowski, Jacek Tampa, FL 25 780
Savtchouk, Alexandre Tampa, FL 9 22
Wilson, Marshall D Tampa, FL 10 399

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