Substrate holder, and use of the substrate holder in a highly accurate measuring instrument
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Nov 9, 2004
Grant Date -
N/A
app pub date -
Oct 11, 2000
filing date -
Oct 11, 1999
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
The invention discloses a substrate holder (8) that is configured to receive a substrate (20) and can be utilized to determine the thickness deviation of a substrate from the standard thickness of a specific substrate type. The substrate holder (8) comprises a one-piece frame having a flat upper surface (42). An opening (30) that defines a peripheral rim (32) is provided in the substrate holder (8). Receiving elements (34) on which spheres are provided are shaped onto the peripheral rim (32) of the opening (30). A substrate (20) placed into the substrate holder (8) thus comes to rest on the upper surfaces of the spheres. The support elements (34) are arranged on the peripheral rim of the opening (30) in such a way that they lie at the vertices of an equilateral triangle. In addition, the spacing from the upper surface of the spheres to the flat upper surface (42) of the substrate holder (8) is dimensioned such that said spacing corresponds substantially to the standard thickness of the substrate type being used.
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