Container for photoresist liquid
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Nov 16, 2004
Grant Date -
Oct 9, 2003
app pub date -
May 5, 2003
filing date -
Apr 8, 1998
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
Methods for discharging high purity liquid chemicals from an inner container in a protective pressure container are disclosed. One end of a liquid-discharge pipe is guided to the exterior of the inner container while the other end is at the bottom of the inner container. The high purity liquid chemical is discharged due to (1) gas pressure from a gas from a source connected to the protective pressure container or (2) a pump associated with the liquid discharge pipe or (3) a gas from a source connected to the inner container. The inner container preferably is blow molded and has an olefinic resin inner layer, a solvent-barrier resin intermediate layer, and an external layer of a light-shielding substance-containing resin composition. The inner container has certain absorbance controls.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully