US Patent No: 6,818,894

Number of patents in Portfolio can not be more than 2000

Method and apparatus for characterization of ultrathin silicon oxide films using mirror-enhanced polarized reflectance fourier transform infrared spectroscopy

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ALSO PUBLISHED AS: 20020180991
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Abstract

Ultrathin silicon oxide films thermally grown on Si(100) are characterized with Mirror-Enhanced Polarized Reflectance Fourier Transform Infrared spectroscopy (MEPR-FTIR). MEPR-FTIR is proposed to effectively probe properties of ultra-thin films. Using a mirror and a polarizer, MEPR-FTIR overcomes the difficulty of weak IR intensities normally encountered in ultrathin gate dielectrics such as SiO.sub.2 and the intensity of the silicon oxide longitudinal optical (LO) mode is found to increase by a factor of about 20. Therefore, FTIR spectrometers with sensitivity down to 0.01% may allow even sub-monolayer probing of silicon oxide on Si substrates.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOISURBANA, IL1123

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cui, Zhenjiang San Jose, CA 30 119
Takoudis, Christos G Oak Park, IL 1 1

Cited Art

Patent Info (Count) # Cites Year
 
INTERNATIONAL BUSINESS MACHINES CORPORATION (1)
5,381,234 Method and apparatus for real-time film surface detection for large area wafers 17 1993
 
LAM RESEARCH CORPORATION (1)
6,200,201 Cleaning/buffer apparatus for use in a wafer processing device 5 1998
 
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. (1)
6,277,657 Apparatus for fabricating semiconductor device and fabrication method therefor 12 2000
 
MKS INSTRUMENTS, INC. (1)
5,900,633 Spectrometric method for analysis of film thickness and composition on a patterned sample 130 1997
 
RESEARCH DEVELOPMENT CORP., 50% ASSIGNED (1)
5,534,698 Solid state surface evaluation methods and devices 11 1994
 
SHIN-ETSU HANDOTAI CO., LTD. (1)
5,321,264 Method for evaluating surface state of silicon wafer 8 1992
 
Silicon Genesis Corporation (1)
6,558,802 Silicon-on-silicon hybrid wafer assembly 27 2000
 
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (1)
6,577,926 Method of detecting and controlling in-situ faults in rapid thermal processing systems 1 1999
 
U.S. Philips Corporation (1)
5,108,540 Method for epitaxial growth from the vapor phase of semiconductor materials 14 1988
 
WISCONSIN ALUMNI RESEARCH FOUNDATION (1)
6,169,289 Signal enhancement for fluorescence microscopy 42 1999

Patent Citation Ranking

Forward Cites

Patent Info (Count) # Cites Year
 
APPLIED MATERIALS, INC. (1)
7,438,468 Multiple band pass filtering for pyrometry in laser based annealing systems 0 2005

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