Thin film transistor array substrate and manufacturing method thereof

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United States of America Patent

PATENT NO 6818923
APP PUB NO 20030197187A1
SERIAL NO

10273891

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Abstract

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A thin film transistor array substrate, and its manufacturing method, that is made using a three-round mask process. Gate patterns, each of which includes a gate line consisting of a transparent metal pattern and a gate metal pattern, a gate electrode, a lower gate pad, a lower data pad, and a pixel electrode are formed using a first mask process. A second mask process forms a gate insulating pattern and a semiconductor pattern. A third mask process forms source and drain patterns, each of which includes a data line, a source electrode, a drain electrode, an upper gate pad and an upper data pad. Additionally, the gate metal pattern on an upper portion of the pixel electrode is removed.

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Patent Owner(s)

Patent OwnerAddress
LG DISPLAY CO LTDSEOUL SOUTH KEREAN SEOUL

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cho, Heung Lyul Suwon-shi, KR 89 797
Kim, Woong Kwon Kunpo-shi, KR 63 731
Nam, Seung Hee Anyang-shi, KR 72 530

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