Reflective moveable diaphragm unit and pressure sensor containing same
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Nov 23, 2004
Issued Date -
N/A
app pub date -
May 24, 2002
filing date -
Mar 7, 2000
priority date (Note) -
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status (Latency Note)
Importance
Abstract
A reflective movable diaphragm unit 2 having diaphragm portions 25 formed by a circular SiO.sub.2 film, a mesa portion 22 and light-reflecting mirror portion 23 of the SiO.sub.2 film disposed in the center, and a ring-shaped spacer 24a and bonding layer 24b formed of metal layers in the circumferential edge portion of the diaphragm portion 25, whereby a pressure sensor is formed.
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Cited Art Landscape
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