Optical systems for measuring form and geometric dimensions of precision engineered parts

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United States of America Patent

PATENT NO 6822745
APP PUB NO 20010043333A1
SERIAL NO

09769859

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Abstract

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The invention features a method for determining a geometric property of a test object, the method including: interferometrically profiling a first surface of the test object in a first coordinate system; interferometrically profiling a second surface of the test object in a second coordinate system different from the first coordinate system; providing a relationship between the first and second coordinate system; and calculating the geometric property based on the interferometrically profiled surfaces and the relationship between the first and second coordinate system. In some embodiments, the relationship may be determined by using calibrated gage blocks or by using a displacement measuring interferometer. Corresponding system are also described.

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Patent Owner(s)

Patent OwnerAddress
ZYGO CORPORATION21 LAUREL BROOK ROAD MIDDLEFIELD CT 06455-0448

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Biegen, James Middletown, CT 2 80
De, Groot Peter Middletown, CT 76 2454
De, Lega Xavier Colonna Middletown, CT 42 1904
Grigg, David Glastonberry, CT 14 183

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