Sensor signal transmission from processing system

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United States of America Patent

PATENT NO 6823753
APP PUB NO 20040226390A1
SERIAL NO

10439521

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Abstract

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A processing system includes a plurality of chamber walls that define a sealed environment. A sensor is positioned in the sealed environment. In one embodiment, a power source, such as a photoelectric cell, is positioned within the environment. In another embodiment, a wireless transmission device is positioned within the sealed environment. Methods for monitoring the conditions within the sealed environment are also disclosed.

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Patent Owner(s)

Patent OwnerAddress
ASM IP HOLDING B V1322 AP ALMERE

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Beginski, David A Gilbert, AZ 4 17

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