Apparatus and method for uniform substrate heating and contaminate collection
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United States of America Patent
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Nov 30, 2004
Grant Date -
Jul 17, 2003
app pub date -
Dec 17, 2002
filing date -
Dec 29, 2000
priority date (Note) -
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status (Latency Note)
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Abstract
Embodiments of the invention generally provides an apparatus and method for heating substrates, comprising a heater disposed within a chamber, a plurality of heated supports movably disposed within the chamber to support at least two substrates thereon and a contamination collector disposed in communication with the chamber.
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