Fine stencil structure correction device
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United States of America Patent
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Nov 30, 2004
Grant Date -
Feb 19, 2004
app pub date -
Jul 2, 2003
filing date -
Jul 3, 2002
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A fine stencil structure correction device has a charged particle beam microscope lens-barrel which scans and corrects shapes of defect portions of a fine stencil structure sample using an etching or deposition function, and the fine stencil structure correction device further comprises transmitted beam detecting means for detecting a transmitted beam which is the charged particle beam penetrating the sample provided on a sample stage when the sample is scanned by the charged particle beam.
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